Diamond deposition from fluorinated precursors using microwave-plasma chemical vapor deposition
- 16 October 1995
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 67 (16) , 2379-2381
- https://doi.org/10.1063/1.114351
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: