Abstract
Silicon single-drift-region impatt diodes designed to operate at D-band frequencies were fabricated with a p+nn+ structure formed by thermal diffusion of boron. A continuous-wave output power of 70 mW at 137 GHz with a conversion efficiency of 3.2% was obtained. The diodes were packaged with a quartz standoff configuration on a copper heatsink and mounted into a cap-type waveguide resonator.

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