UV Photoannealing and RTP of Thin Sol-Gel Films
- 1 January 1996
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- Rapid Thermal Processing of Magnetic Thin Films for Data Storage DevicesPublished by Springer Nature ,1996
- UV photo-annealing of thin sol-gel filmsApplied Surface Science, 1995
- Structural change in sol-gel-derived SiO 2 films using ultraviolet irradiationPublished by SPIE-Intl Soc Optical Eng ,1994
- Interrelationship between Densification, Crystallization, and Chemical Evolution in Sol‐Gel Titania Thin FilmsJournal of the American Ceramic Society, 1994
- Novel Modification Method of Sol-Gel Thin FilmsJournal of the Ceramic Society of Japan, 1994
- Synthesis of SiO2 thin films by sol-gel method using photoirradiation and molecular structure analysisJournal of Sol-Gel Science and Technology, 1994
- Deposition of Oxide Based Advanced Electronic and Optical Materials by Rapid Isothermal Processing (RIP) Assisted Metalorganic Chemical Vapor Deposition (MOCVD)MRS Proceedings, 1994
- Surface sites on spinel-type and corundum-type metal oxide powdersLangmuir, 1993
- Some photoeffect roles in rapid isothermal processingApplied Physics Letters, 1991
- Comparative study of phosphosilicate glass on (100) silicon by furnace and rapid isothermal annealingJournal of Applied Physics, 1991