Stoichiometric Effects of Sputtered Barium Strontium Titanate Films
- 1 January 1997
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
Barium Strontium Titanate films have been deposited by rf magnetron sputtering and have been studied with respect to Ba/Sr ratio. Physical and electrical characterization has been done as a function of temperature, thickness, and composition, and results show that dielectric constant increases with increasing temperature, thickness (up to ∼80 nm), and Ba/Sr ratio for the compositions studied. The lattice parameters for the sputtered films are larger than those expected for powder samples and also increase with increasing Ba/Sr ratio.Keywords
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