Electrical properties and poling of BaTiO3 thin films

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Abstract
Dielectric and ferroelectric properties were measured for both highly a‐axis textured and randomly oriented BaTiO3 thin films deposited on Pt coated MgO substrates via metal‐organic chemical‐vapor deposition. Dielectric constants on the order of ε∼10 and an absence of ferroelectric hysteresis were generally observed for the as‐deposited films. Upon applying an electric field exceeding a threshold value of ∼50–100 kV/cm across the film, both the dielectric constant and the ferroelectric hystersis were enhanced significantly as a result of poling. The dielectric constant increased to ε∼100, and the spontaneous polarization of the a‐axis textured film reached Ps≥15 μC/cm2. The measured dielectric and ferroelectric properties of the BaTiO3 thin films depended on the microstructure of the films.