Implant isolation of InxAl1−xN and InxGa1−xN

• 1 November 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 13  (6) , 2293-2296
• https://doi.org/10.1116/1.588065

Abstract