Requirements contributing to the design of devices used in correcting electron lenses
- 1 August 1954
- journal article
- Published by IOP Publishing in British Journal of Applied Physics
- Vol. 5 (8) , 294-299
- https://doi.org/10.1088/0508-3443/5/8/307
Abstract
The voltage requirements for a modification of the spherical correction system of Seeliger(2) are given. The potential changes introduced by unintentional asymmetries of non-rotationallysymmetrical elements are calculated and an expression is given for the resulting aberrations. It is shown that some of these can be removed by the Stigmator of Rang,(4) but that others remain which would necessitate positioning to 1 μ in order to attain a resolution improvement of three times. With the addition of certain other elements, tolerances could be raised to 10 μ for a resolution improvement of ten times. In the course of the work, the mechanism of Seelinger's system and its suggested modification are compared with another system proposed by Burfoot.(5)Keywords
This publication has 1 reference indexed in Scilit:
- Correction of Electrostatic Lenses by Departure from Rotational SymmetryProceedings of the Physical Society. Section B, 1953