A 0,25μm NMOS transistor fabricated with X-ray lithography
- 1 March 1991
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 13 (1-4) , 319-322
- https://doi.org/10.1016/0167-9317(91)90102-j
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- X-ray lithographyJournal of Vacuum Science & Technology B, 1988