HIGH RESOLUTION HUMIDITY SENSOR BASED ON STW RESONANT DEVICE

• 1 February 2004
• proceedings article
• Published by World Scientific Pub Co Pte Ltd
• p. 170-175
• https://doi.org/10.1142/9789812702944_0025

Abstract

Keywords

• COATED SURFACE
• POLYMERIC FILMS
• PECVD
• MEASURED AT CONTROLLED
• QUARTZ
• RESPONSE TIME
• SURFACE TRANSVERSE
• TRANSVERSE ACOUSTIC