Oriented ZnO Films for Microwave Shear Mode Transducers
- 1 January 1982
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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- Preferred orientation of ZnO films controlled by r.f. sputteringThin Solid Films, 1982
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- Black a-Si solar selective absorber surfacesJournal of Applied Physics, 1980
- rf sputtering of ZnO shear-wave transducersJournal of Applied Physics, 1973
- Structures and electrical properties of zinc oxide films prepared by low pressure sputtering systemThin Solid Films, 1971
- Performance of Shear Mode Zinc Oxide Thin-Film Ultrasonic TransducersJournal of Applied Physics, 1969
- Crystallographic Orientation of Zinc Oxide Films Deposited by Triode SputteringJournal of Vacuum Science and Technology, 1969