A stable optical photometer for vacuum coating
- 1 March 1985
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 3 (2) , 436-437
- https://doi.org/10.1116/1.573236
Abstract
A spatial filter is used instead of the conventional arrangement of a beam chopper and filter to reduce the effects of background light from the evaporation source. Without moving parts and with very simple electronics, the monitor is inherently stable and has a fast response.Keywords
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