Atomic force microscope–force mapping and profiling on a sub 100-Å scale
- 15 May 1987
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 61 (10) , 4723-4729
- https://doi.org/10.1063/1.338807
Abstract
A modified version of the atomic force microscope is introduced that enables a precise measurement of the force between a tip and a sample over a tip‐sample distance range of 30–150 Å. As an application, the force signal is used to maintain the tip‐sample spacing constant, so that profiling can be achieved with a spatial resolution of 50 Å. A second scheme allows the simultaneous measurement of force and surface profile; this scheme has been used to obtain material‐dependent information from surfaces of electronic materials.This publication has 6 references indexed in Scilit:
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