Preparation and Evaluation of Spreading Resistance Probe Tip
- 1 January 1970
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 117 (5) , 721-725
- https://doi.org/10.1149/1.2407615
Abstract
The spreading resistance technique used to evaluate various types of silicon structures is dependent primarily on the probe point. Data are presented on point preparation and loading of different point materials. A method for preparation and evaluation of point characteristics for effective use on thin silicon structures is described.Keywords
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