Improvement of leakage currents of Pt/(Ba, Sr)TiO3/Pt capacitors

• 2 June 1997
• journal article
• Published by AIP Publishing in Applied Physics Letters
• Vol. 70  (22) , 3053-3055
• https://doi.org/10.1063/1.118746

Abstract

Keywords

• PLATINUM
• STRONTIUM COMPOUNDS
• LEAKAGE CURRENTS
• THIN FILM CAPACITORS
• MIM DEVICES
• SPUTTER DEPOSITION
• DRAM CHIPS
• ANNEALING
• VACANCIES (CRYSTAL)
• FERROELECTRIC CAPACITORS
• FERROELECTRIC STORAGE
• BARIUM COMPOUNDS
• STRONTIUM TITANATES
• LEAKAGE CURRENT
• CAPACITORS
• SPUTTERING
• MEMORY DEVICES
• THIN FILMS