Microstructural analysis of Au/Pt/Ti contacts to p-type InGaAs

• 1 August 1995
• journal article
• research article
• Published by Springer Nature in Journal of Materials Science: Materials in Electronics
• Vol. 6  (4) , 219-227
• https://doi.org/10.1007/bf00187201

Abstract

Keywords

• ELECTRON BEAM
• NITROGEN ATMOSPHERE
• CONTACT RESISTANCE
• MICROSTRUCTURAL CHANGE
• OHMIC CONTACT