Near-Field Scanning Optical Microscopy (NSOM)
- 12 July 1988
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 0897, 91-100
- https://doi.org/10.1117/12.944521
Abstract
Superresolution optical images have been generated with near-field scanning optical microscopy (NSOM). The underlying concept is presented and several modes of operation are discussed. A resolution based on edge sharpness of 70 nm or better has been demonstrated with two different instruments. Images have been obtained which characterize the resolution as a function of two critical parameters: the aperture size and the aperture-sample separation. The near-field images also illustrate novel features resulting from several forms of contrast. Finally, the potential of NSOM is compared with conventional lens-based forms of microscopy as well as with more recent scanned tip methods.Keywords
This publication has 0 references indexed in Scilit: