Deep-ultraviolet damage to fused silica

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (6) , 3275-3279
• https://doi.org/10.1116/1.587611

Abstract

Keywords

• FUSED SILICA
• DEEP ULTRAVIOLET DAMAGE
• DAMAGE TO FUSED