Adsorption of oxygen on clean cleaved (110) gallium-arsenide surfaces

Abstract
The adsorption of oxygen on clean cleaved (110) GaAs surfaces of n- and p-type material was studied by means of Auger electron spectroscopy, ellipsometry, and low-energy-electron diffraction. For both types of material a stable state of adsorption is found with an absolute coverage of approximately half a monolayer of oxygen. The sticking coefficient, which is dependent on the coverage, has different initial values S0 for p- and n-type material (p:S01.4×106, n:S03×105). The coverage dependence of the sticking coefficient for both p- and n-type crystals is described in terms of an Elovich equation which can be derived for a thermally activated adsorption. Different bonding models for the adsorption of oxygen on the (110) surface are discussed and a qualitative interpretation of the different behavior of p- and n-type materials is given in terms of the different positions of the Fermi level at the surface.