Direct Writing of Patterned Ceramics Using Electron‐Beam Lithography and Metallopolymer Resists
- 3 February 2004
- journal article
- research article
- Published by Wiley in Advanced Materials
- Vol. 16 (3) , 215-219
- https://doi.org/10.1002/adma.200305740
Abstract
No abstract availableKeywords
This publication has 27 references indexed in Scilit:
- Ceramics Containing Magnetic Co–Fe Alloy Nanoparticles from the Pyrolysis of a Highly Metallized Organometallic Polymer PrecursorAdvanced Materials, 2003
- Tunneling magnetotransport in nanogranular-in-gap structureIEEE Transactions on Magnetics, 2002
- Laser and Electron-Beam Induced Growth of Nanoparticles for 2D and 3D Metal PatterningAdvanced Materials, 2002
- Electron beam lithography in passivated gold nanoclustersMicroelectronic Engineering, 2001
- Polyferrocenylsilanes: Metal-Containing Polymers for Materials Science, Self-Assembly and Nanostructure ApplicationsMacromolecular Rapid Communications, 2001
- Organic–Inorganic Nanocomposites: Unique Resists for NanolithographyAdvanced Materials, 2001
- Room Temperature Magnetic Quantum Cellular AutomataScience, 2000
- Direct Writing of Metallic Nanostructures by Means of Metal ColloidsMaterials Science Forum, 1998
- Electron-beam lithography with metal colloids: Direct writing of metallic nanostructuresJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1998
- Single-source precursors of structured catalysts for the hydrogenation of 1,3-butadieneChemistry of Materials, 1993