Vacuum Thermal Etching of Germanium and Silicon Surfaces

• 1 January 1967
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 114  (4) , 398
• https://doi.org/10.1149/1.2426605

Abstract

Keywords

• SILICON SURFACES
• THERMAL ETCHING
• GERMANIUM AND SILICON
• VACUUM THERMAL
• ETCHING OF GERMANIUM