Applications of air bearings and optics

• 1 October 1980
• journal article
• other
• Published by Elsevier in Precision Engineering
• Vol. 2  (4) , 216-224
• https://doi.org/10.1016/0141-6359(80)90014-8

Abstract

Keywords

• BEARINGS AND OPTICS
• AIR BEARING
• SUMMARISES
• CORNER
• INTERFEROMETRY
• AEROSTATIC
• MACHINE
• PRECISION
• LANGENBECK