Time-dependent solution of Boltzmann equation in rf plasmas: A comparison with the effective field approximation
- 1 March 1987
- journal article
- research article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 7 (1) , 125-137
- https://doi.org/10.1007/bf01016003
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Electron energy distributions and excitation rates in high-frequency argon dischargesJournal of Physics D: Applied Physics, 1983
- Energy Distribution of Electrons in High Frequency Gas DischargesPhysical Review B, 1946
- Conduction and Dispersion of Ionized Gases at High FrequenciesPhysical Review B, 1946