Comparison of measured and calculated dose for plasma source ion implantation into 3-D objects
- 19 May 1997
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 127-128, 996-999
- https://doi.org/10.1016/s0168-583x(97)00046-3
Abstract
No abstract availableKeywords
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