Design, Fabrication, And Testing Of A C-shape Actuator
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 416-419
- https://doi.org/10.1109/sensor.1995.721835
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Insect-model based microrobot with elastic hingesJournal of Microelectromechanical Systems, 1994
- Fabrication and operation of polyimide bimorph actuators for a ciliary motion systemJournal of Microelectromechanical Systems, 1993
- Thermally excited silicon microactuatorsIEEE Transactions on Electron Devices, 1988