Contact resistance of silicon-polysilicon interconnection for different current-flow geometries
- 3 January 1985
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 21 (1) , 13-14
- https://doi.org/10.1049/el:19850009
Abstract
The relationship between contact window dimensions, specific contact resistivity ρc and sheet resistance on contact resistance has been investigated for different current-flow geometries. It is shown that as the window size is reduced, ρc starts to become the dominant factor giving contact resistances independent of the direction of current flow.Keywords
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