Laser-induced chemical vapor deposition of chromium films from chromiumhexacarbonyl using a KrF excimer laser
- 1 January 1989
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 36 (1-4) , 177-184
- https://doi.org/10.1016/0169-4332(89)90912-4
Abstract
No abstract availableKeywords
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- A review of laser–microchemical processingJournal of Vacuum Science & Technology B, 1983
- Low-temperature refractory metal film depositionApplied Physics Letters, 1982