Polysilicon Tensile Testing With Electrostatic Gripping

Publisher Website

1 January 1998

journal article
Published by Springer Nature in MRS Proceedings

Vol. 518
https://doi.org/10.1557/proc-518-191

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Tensile testing of thin-film microstructures
Published by SPIE-Intl Soc Optical Eng ,1997