Advanced control design considerations for the Czochralski process
- 1 November 1987
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 85 (1-2) , 256-263
- https://doi.org/10.1016/0022-0248(87)90232-6
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- Dynamics and control of the Czochralski processJournal of Crystal Growth, 1987
- Thermal-capillary analysis of Czochralski and liquid encapsulated Czochralski crystal growthJournal of Crystal Growth, 1986
- A technique for experimentally determining the transfer function of a Czochralski pulling processJournal of Crystal Growth, 1986
- Interface shape in Czochralski grown crystals: Effect of conduction and radiationJournal of Crystal Growth, 1985
- The theory and practice of dislocation reduction in GaAs and InPJournal of Crystal Growth, 1984
- Internal model control. A unifying review and some new resultsIndustrial & Engineering Chemistry Process Design and Development, 1982
- Multivariable feedback design: Concepts for a classical/modern synthesisIEEE Transactions on Automatic Control, 1981
- Control of diameter in Czochralski and related crystal growth techniquesJournal of Crystal Growth, 1977
- Cross-sectional resistivity variations in germanium single crystalsSolid-State Electronics, 1960
- Some defects in crystals grown from the melt - I. Defects caused by thermal stressesProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1956