Attentuating Thin Films for SAW Devices

• 1 January 1980
• conference paper
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 442-445
• https://doi.org/10.1109/ultsym.1980.197436

Abstract

Keywords

• THIN FILM DEVICES
• SURFACE ACOUSTIC WAVE DEVICES
• OPTICAL FILMS
• PIEZOELECTRIC FILMS
• SURFACE WAVES
• CONDUCTIVITY
• ATTENUATION
• SURFACE ACOUSTIC WAVES
• SURFACE CONTAMINATION
• SUBSTRATES