Dynamics of Thin Film NiTi Cantilevers on Si
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
Although the thermo-mechanical properties of NiTi are well known for bulk material, its deposition and utilization as a thin film are still in their earliest stages of research. The deposition of thin-films of Shape Memory Effect NiTi onto Si(100) wafers offers several advantages over bulk NiTi, including fast response times and comparatively large transformation forces. This has made it a promising candidate material as micro-actuators for Micro-Electro-Mechanical (MEMS) systems as well as for strain measurements. The cycling time for actuation was measured for a 20 μm free standing NiTi thin film cantilever. It was demonstrated that cycling frequencies of up to 50 Hz are achievable.Keywords
This publication has 3 references indexed in Scilit:
- Micron Sized Arm Using Reversible TiNi Alloy Thin Film ActuatorsMRS Proceedings, 1992
- Cycling Times of Thin-Film NiTi on SiMRS Proceedings, 1991
- A summary of recent research on the nitinol alloys and their potential application in ocean engineeringOcean Engineering, 1968