Abstract
A Monte-Carlo method for the simulation of random walks and reactions of point defects in a lattice has been developed. It allows a physically more realistic treatment of point defect annealing than rate equations of diffusion theory. In this paper (I) the simulated annealing of monovacancies at an inexhaustible sink is compared with the results of the diffusion theory. Subsequently the method is applied to the precipitation of mono- and divacancies in an fee lattice.

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