Development of the dispersive microlens
- 1 March 1994
- journal article
- Published by IOP Publishing in Pure and Applied Optics: Journal of the European Optical Society Part A
- Vol. 3 (2) , 97-101
- https://doi.org/10.1088/0963-9659/3/2/001
Abstract
The dispersive microlens is a hybrid micro-optical element designed to simultaneously focus and disperse light in a wavelength band. We discuss the principle of operation of the dispersive microlens along with different design options. We present examples of elements fabricated in CdTe and Si. The elements are fabricated using either binary photolithography or a new methodology we call greyscale photolithography. The greyscale photolithography introduced in this letter can be used to fabricate analogue (smooth) surfaces of complicated shape instead of stepped (binary) surfaces.Keywords
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