Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A+ Primary Ions
Open Access
- 1 January 1983
- journal article
- Published by Japan Institute of Metals in Journal of the Japan Institute of Metals and Materials
- Vol. 47 (6) , 494-501
- https://doi.org/10.2320/jinstmet1952.47.6_494
Abstract
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