Production and characterization of boron nitride films obtained by R.F. magnetron sputtering and reactive ion-beam-assisted deposition
- 1 December 1988
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 36 (1) , 199-206
- https://doi.org/10.1016/0257-8972(88)90150-8
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- An apparatus for combined vapor deposition and ion implantation to modify the surface properties of metalsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Ion implantation and ion assisted coating of metalsJournal of Vacuum Science & Technology A, 1985