Matching an RF sheath model to a bulk plasma model
- 1 January 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 23 (4) , 717-727
- https://doi.org/10.1109/27.467994
Abstract
No abstract availableThis publication has 29 references indexed in Scilit:
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