Abstract
The gas mixing effect in the electron cyclotron resonance (ECR) multicharged ion sources is analyzed while taking into account the ionization cross sections of different support gases such as H2, He, Ne, N2, and O2. The Ar9+ ion currents delivered by a CAPRICE ECR ion source are measured as a function of the support gas pressure. The efficiency of ionization of these different gases by electron impact may partially explain the improvement of the extracted Ar9+ ion current.

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