Design of an ultralow coverage metal evaporator based on a geometric factor
- 1 July 1986
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 4 (4) , 1949-1951
- https://doi.org/10.1116/1.573755
Abstract
An ultralow coverage eight-metal evaporator has been designed, built, tested, and put into use. Based on a geometric factor of 1:200, a metal coverage as low as 10−4 monolayer is reproducibly obtained with an error in coverage less than 20%. Various considerations during the design of the evaporator are discussed.Keywords
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