Microfabrication of microtip on photocantilever for near-field scanning microscopy and investigation of effect of microtip shape on spatial resolution
- 1 April 1998
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 83 (7) , 3547-3551
- https://doi.org/10.1063/1.366569
Abstract
We experimentally investigated the dependence of spatial resolution on the shape of a microtip on our photocantilever, in order to improve the spatial resolution of near-field scanning optical microscopy. Two different cone angles of silicon-dioxide microtips were microfabricated by a new fabrication process. The experimental results, which indicate there is a relationship between the spatial resolution and cone angle of the microtip, were interpreted by calculations based on a simple theoretical model.This publication has 14 references indexed in Scilit:
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