Negative metal-ion source for secondary-ion mass spectrometry
- 1 May 1993
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 64 (5) , 1146-1149
- https://doi.org/10.1063/1.1144108
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Negative metal ion sources (invited)Review of Scientific Instruments, 1992
- Further evaluation of the high intensity plasma sputter heavy negative ion sourceNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1988