Surface microstructural effects on angular distribution of molybdenum particles sputtered with low energy Ne+ ions
- 1 October 1979
- journal article
- Published by Elsevier in Journal of Nuclear Materials
- Vol. 84 (1-2) , 101-108
- https://doi.org/10.1016/0022-3115(79)90153-3
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Energy and angular distribution of gold and copper atoms sputtered with either 15-or 30-KeV H+, He+, and Ar+ ionsJournal of Nuclear Materials, 1978
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- The equilibrium topography of sputtered amorphous solidsJournal of Materials Science, 1969
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