Gas incorporation during ion-assisted deposition in bias sputtering

• 1 July 1993
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 11  (4) , 1447-1450
• https://doi.org/10.1116/1.578681

Abstract

Keywords

• GAS INCORPORATION
• ASSISTED DEPOSITION
• BIAS SPUTTERING
• INCORPORATION DURING ION
• DEPOSITION IN BIAS