Modification of surface energy, dry etching, and organic film removal using atmospheric-pressure pulsed-corona plasma
- 1 January 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Industry Applications
- Vol. 31 (3) , 494-499
- https://doi.org/10.1109/28.382108
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Control of volatile organic compounds by an AC energized ferroelectric pellet reactor and a pulsed corona reactorIEEE Transactions on Industry Applications, 1992
- Combined removal of SO/sub 2/, NO/sub x/, and fly ash from simulated flue gas using pulsed streamer coronaIEEE Transactions on Industry Applications, 1989
- Plasma Cleaning of SurfacesPublished by Springer Nature ,1979