Variation of secondary ion emission yield with atomic concentrations of Fe, Ni, and Cr ternary alloys and oxides: Application to the analysis of thin oxide films

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Abstract
For binary and ternary alloys of Fe, Ni, and Cr covered with oxygen and for solid oxides of these elements, the emission yield of monoatomic ions, Fe+, Ni+, and Cr+, are linear functions of the atomic concentrations CFe, CNi, and CCr . This empirical law suggest that the emission of M+ ions obeys a binary process, involving dynamic electronic exchanges between the M sputtered atoms and their neighbors during inelastic collisions. The determined formula for the interrelationship between the M+ intensities and the atomic concentrations is applied to the quantitative analysis of oxide films developed at high temperature on a refractory alloy.