High-resolution transmission electron microscopy of cubic Si3N4

Abstract
A cubic Si3N4 phase/nanostructure has been characterized by means of high-resolution analytical electron microscopy. The specimen prepared from β-Si3N4 powders at a high pressure and temperature by shock wave compression contained nanometer-sized Si3N4 crystallites. The results of nano-beam electron diffraction analysis and high-resolution lattice images as well as computer simulations revealed that the Si3N4 crystallites had a cubic symmetry with spinel structure. The electron energy loss spectrum suggested that the chemical compositions of these nanostructures were close to Si3N4.