Microvalves with bistable buckled polymer diaphragms
- 1 March 1996
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 6 (1) , 77-79
- https://doi.org/10.1088/0960-1317/6/1/017
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- On a micro-electro-mechanical nonvolatile memory cellIEEE Transactions on Electron Devices, 1990