Refractory silicides for integrated circuits

• 1 July 1980
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 17  (4) , 775-792
• https://doi.org/10.1116/1.570560

Abstract

Keywords

• INTEGRATED CIRCUITS
• SIC
• METAL SILICIDES
• STRESS
• STRUCTURE
• RESISTIVITY
• DEVICE