Mechanical properties of LIGA-deposited nickel for MEMS transducers
- 22 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 607-610
- https://doi.org/10.1109/sensor.1997.613724
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysiliconPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1997
- A system for measuring biaxial creep strains over short gage lengthsExperimental Mechanics, 1996