The STIC Technology-A Monolithic Approach for Combining Tantalum and Silicon Technologies
- 1 December 1981
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Components, Hybrids, and Manufacturing Technology
- Vol. 4 (4) , 396-402
- https://doi.org/10.1109/tchmt.1981.1135823
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Laser vaporization of metal films–Effect of optical interference in underlying dielectric layersJournal of Applied Physics, 1977
- Stability Analysis of Laser Trimmed Thin Film ResistorsIEEE Transactions on Parts, Hybrids, and Packaging, 1975
- Laser Machining of Thin Films and Integrated CircuitsBell System Technical Journal, 1968