Molecule Formation in Oxide Sputtering

This publication has 9 references indexed in Scilit:

• Comparative SNMS and SIMS studies of oxidized Ce and Gd
  Surface Science, 1979
• Sputtering of Ta2O5 by Ar+ ions at energies below 1 keV
  Surface Science, 1978
• Computer simulation of the sputtering of clusters
  Journal of Applied Physics, 1976
• Sputtering—a review of some recent experimental and theoretical aspects
  Applied Physics A, 1975
• Mass spectrometry of neutral molecules sputtered from polycrystalline metals by Ar+-ions of 100?1000 eV
  Zeitschrift für Physik B Condensed Matter, 1975
• Mass spectroscopy of sputtered neutrals and its application for surface analysis
  Surface Science, 1974
• Glow-discharge mass spectrometry—Technique for determining elemental composition profiles in solids
  Journal of Applied Physics, 1974
• On the energy distribution of sputtered dimers
  Radiation Effects, 1974
• Mass Spectrometric Study of Neutral Particles Sputtered from Cu by 0- to 100-eV Ar Ions
  Journal of Applied Physics, 1964