Gallium Oxide Thin Film by Reactive Vapour Deposition

• 1 May 1977
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 16  (5) , 841-842
• https://doi.org/10.1143/jjap.16.841

Abstract

Keywords

• GALLIUM OXIDE
• OXIDE THIN FILM
• FILM BY REACTIVE
• REACTIVE VAPOUR DEPOSITION